• Prepared wafers with SU-8 patterns on them. They are for a lab session on Monday. Worked in the MRC cleanroom. During the preparation, I found that 2 parameters, exposing duration and developing time, didn't work any more. I had to waste 2 hours and 2 wafers to correct them. The preparation started at around 11:30 am and ended after 6 pm, with a pause between 2 and 4 pm to help a student who had signed up for an L-Edit session. [1130:1800]
• Bought Kimwipes from the ChemStore using ME395 CUFS#. Costs ~$2.
• Found that the RIE at the MRC cleanroom is down. Repair time is expected to be ~3 weeks.